发明授权
- 专利标题: Semiconductor constructions
- 专利标题(中): 半导体结构
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申请号: US12728942申请日: 2010-03-22
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公开(公告)号: US08274081B2公开(公告)日: 2012-09-25
- 发明人: Vladimir Mikhalev , Jim Fulford , Yongjun Jeff Hu , Gordon A. Haller , Lequn Liu
- 申请人: Vladimir Mikhalev , Jim Fulford , Yongjun Jeff Hu , Gordon A. Haller , Lequn Liu
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L33/16
摘要:
Some embodiments include methods of forming isolation structures. A semiconductor base may be provided to have a crystalline semiconductor material projection between a pair of openings. SOD material (such as, for example, polysilazane) may be flowed within said openings to fill the openings. After the openings are filled with the SOD material, one or more dopant species may be implanted into the projection to amorphize the crystalline semiconductor material within an upper portion of said projection. The SOD material may then be annealed at a temperature of at least about 400° C. to form isolation structures. Some embodiments include semiconductor constructions that include a semiconductor material base having a projection between a pair of openings. The projection may have an upper region over a lower region, with the upper region being at least 75% amorphous, and with the lower region being entirely crystalline.
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