Invention Grant
- Patent Title: Projection exposure apparatus and optical system
- Patent Title (中): 投影曝光装置和光学系统
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Application No.: US12390685Application Date: 2009-02-23
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Publication No.: US08269948B2Publication Date: 2012-09-18
- Inventor: Sascha Bleidistel , Bernhard Geuppert
- Applicant: Sascha Bleidistel , Bernhard Geuppert
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006039821 20060825
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/52

Abstract:
The disclosure relates to a projection exposure apparatus and an optical system, such as a projection objective or an illumination system in a projection exposure apparatus for microlithography, that includes at least one optical element and at least one manipulator having a drive device for the optical element. The drive device can have at least one movable partial element and at least one stationary partial element movable relative to one another in at least one direction of movement.
Public/Granted literature
- US20090225297A1 PROJECTION EXPOSURE APPARATUS AND OPTICAL SYSTEM Public/Granted day:2009-09-10
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