Invention Grant
US08269948B2 Projection exposure apparatus and optical system 有权
投影曝光装置和光学系统

Projection exposure apparatus and optical system
Abstract:
The disclosure relates to a projection exposure apparatus and an optical system, such as a projection objective or an illumination system in a projection exposure apparatus for microlithography, that includes at least one optical element and at least one manipulator having a drive device for the optical element. The drive device can have at least one movable partial element and at least one stationary partial element movable relative to one another in at least one direction of movement.
Public/Granted literature
Information query
Patent Agency Ranking
0/0