发明授权
US08268667B2 Memory device using ion implant isolated conductive metal oxide
有权
使用离子注入隔离导电金属氧化物的存储器件
- 专利标题: Memory device using ion implant isolated conductive metal oxide
- 专利标题(中): 使用离子注入隔离导电金属氧化物的存储器件
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申请号: US13215895申请日: 2011-08-23
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公开(公告)号: US08268667B2公开(公告)日: 2012-09-18
- 发明人: Darrell Rinerson , Robin Cheung , David Hansen , Steven Longcor , Rene Meyer , Jonathan Bornstein , Lawrence Schloss
- 申请人: Darrell Rinerson , Robin Cheung , David Hansen , Steven Longcor , Rene Meyer , Jonathan Bornstein , Lawrence Schloss
- 申请人地址: US CA Sunnyvale
- 专利权人: Unity Semiconductor Corporation
- 当前专利权人: Unity Semiconductor Corporation
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Stolowitz Ford Cowger LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Memory cell formation using ion implant isolated conductive metal oxide is disclosed, including forming a bottom electrode below unetched conductive metal oxide layer(s), forming the unetched conductive metal oxide layer(s) including depositing at least one layer of a conductive metal oxide (CMO) material (e.g., PrCaMnOx, LaSrCoOx, LaNiOx, etc.) over the bottom electrode. At least one portion of the layer of CMO is configured to act as a memory element without etching, and performing ion implantation on portions of the layer(s) of CMO to create insulating metal oxide (IMO) regions in the layer(s) of CMO. The IMO regions are positioned adjacent to electrically conductive CMO regions in the unetched layer(s) of CMO and the electrically conductive CMO regions are disposed above and in contact with the bottom electrode and form memory elements operative to store non-volatile data as a plurality of conductivity profiles (e.g., resistive states indicative of stored data).
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