Invention Grant
- Patent Title: Cyclic olefin compositions for temporary wafer bonding
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Application No.: US12969367Application Date: 2010-12-15
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Publication No.: US08221571B2Publication Date: 2012-07-17
- Inventor: Wenbin Hong , Dongshun Bai , Tony D. Flaim , Rama Puligadda
- Applicant: Wenbin Hong , Dongshun Bai , Tony D. Flaim , Rama Puligadda
- Applicant Address: US MO Rolla
- Assignee: Brewer Science Inc.
- Current Assignee: Brewer Science Inc.
- Current Assignee Address: US MO Rolla
- Agency: Hovey Williams LLP
- Main IPC: B29C53/82
- IPC: B29C53/82 ; B29C65/00 ; B32B3/00 ; B32B5/00

Abstract:
New compositions and methods of using those compositions as bonding compositions are provided. The compositions comprise a cycloolefin copolymer dispersed or dissolved in a solvent system, and can be used to bond an active wafer to a carrier wafer or substrate to assist in protecting the active wafer and its active sites during subsequent processing and handling. The compositions form bonding layers that are chemically and thermally resistant, but that can also be softened or dissolved to allow the wafers to slide or be pulled apart at the appropriate stage in the fabrication process.
Public/Granted literature
- US20110086955A1 CYCLIC OLEFIN COMPOSITIONS FOR TEMPORARY WAFER BONDING Public/Granted day:2011-04-14
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