发明授权
US08208128B2 Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method
有权
位置测量系统和位置测量方法，移动体装置，移动体驱动方法，曝光装置和曝光方法，图案形成装置和装置制造方法
- 专利标题： Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method
- 专利标题（中）： 位置测量系统和位置测量方法，移动体装置，移动体驱动方法，曝光装置和曝光方法，图案形成装置和装置制造方法
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申请号： US12366934申请日： 2009-02-06
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公开(公告)号： US08208128B2公开(公告)日： 2012-06-26
- 发明人: Susumu Makinouchi
- 申请人： Susumu Makinouchi
- 申请人地址： JP Tokyo
- 专利权人： Nikon Corporation
- 当前专利权人： Nikon Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Oliff & Berridge, PLC
- 优先权： JP2008-028288 20080208
- 主分类号： G01B11/00
- IPC分类号： G01B11/00 ; G03B27/32 ; G03B27/42 ; G03B27/58 ; G03B27/62
摘要：
A mirror block on which moving gratings are arranged is fixed to the lower surface of a stage. Fixed gratings are placed on the upper surface of a stage platform that is opposed to the lower surface of the stage. A Y encoder that measures Y positional information of the stage is configured including the moving gratings and the fixed gratings. Similarly, an X encoder that measures X positional information of the stage is configured including the moving gratings and the fixed grating.
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