发明授权
US08164137B2 Multiple-gate MOS transistor using Si substrate and method of manufacturing the same
有权
使用Si衬底的多栅极MOS晶体管及其制造方法
- 专利标题: Multiple-gate MOS transistor using Si substrate and method of manufacturing the same
- 专利标题(中): 使用Si衬底的多栅极MOS晶体管及其制造方法
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申请号: US12556666申请日: 2009-09-10
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公开(公告)号: US08164137B2公开(公告)日: 2012-04-24
- 发明人: Young Kyun Cho , Tae Moon Roh , Jong Dae Kim
- 申请人: Young Kyun Cho , Tae Moon Roh , Jong Dae Kim
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunication Research Institute
- 当前专利权人: Electronics and Telecommunication Research Institute
- 当前专利权人地址: KR Daejeon
- 代理机构: Ladas & Parry LLP
- 优先权: KR10-2005-0089718 20050927
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L21/02
摘要:
Provided are a multiple-gate MOS (metal oxide semiconductor) transistor and a method of manufacturing the same. The transistor includes a single crystalline active region having a channel region having an upper portion of a streamlined shape (∩) obtained by patterning an upper portion of a bulk silicon substrate with an embossed pattern, and having a thicker and wider area than the channel region; a nitride layer formed at both side surfaces of the single crystalline active region to expose an upper portion of the single crystalline active region at a predetermined height; and a gate electrode formed to be overlaid with the exposed upper portion of the single crystalline active region of the channel region.
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