Invention Grant
US08153337B2 Photomask and method for fabricating source/drain electrode of thin film transistor
有权
用于制造薄膜晶体管的源极/漏极的光掩模和方法
- Patent Title: Photomask and method for fabricating source/drain electrode of thin film transistor
- Patent Title (中): 用于制造薄膜晶体管的源极/漏极的光掩模和方法
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Application No.: US12629985Application Date: 2009-12-03
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Publication No.: US08153337B2Publication Date: 2012-04-10
- Inventor: Zong-Long Jhang , Chia-Ming Chang , Hsiang-Chih Hsiao , Chun-Yi Chiang , Che-Yung Lai , Chou-Huan Yu , Ta-Wen Liao
- Applicant: Zong-Long Jhang , Chia-Ming Chang , Hsiang-Chih Hsiao , Chun-Yi Chiang , Che-Yung Lai , Chou-Huan Yu , Ta-Wen Liao
- Applicant Address: TW Hsinchu
- Assignee: AU Optronics Corp.
- Current Assignee: AU Optronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: Thomas|Kayden
- Priority: TW98129226A 20090831
- Main IPC: G03F1/00
- IPC: G03F1/00 ; G03F7/00
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Abstract:
A photomask for fabricating a thin film transistor (TFT) is disclosed. The photomask includes a translucent layer disposed on a transparent substrate and covering U-shaped and rectangular channel-forming regions of the transparent substrate. First and second light-shielding layers are disposed on the translucent layer and located at the outer and inner sides of the U-shaped channel-forming region, respectively, and third and fourth light-shielding layers are disposed on the translucent layer and located at opposite sides of the rectangular channel-forming region, respectively, to serve as source/drain-forming regions. An end of the third light-shielding layer extends to the first light-shielding layer. A plurality of first light-shielding islands is disposed on the translucent layer and located within the rectangular channel-forming region. A method for fabricating source/drain electrodes of a TFT is also disclosed.
Public/Granted literature
- US20110053323A1 PHOTOMASK AND METHOD FOR FABRICATING SOURCE/DRAIN ELECTRODE OF THIN FILM TRANSISTOR Public/Granted day:2011-03-03
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