Invention Grant
- Patent Title: Method of fabricating semiconductor device with a high breakdown voltage between neighboring wells
- Patent Title (中): 制造相邻孔之间具有高击穿电压的半导体器件的方法
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Application No.: US12606634Application Date: 2009-10-27
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Publication No.: US08148774B2Publication Date: 2012-04-03
- Inventor: Hidemitsu Mori , Kazuhiro Takimoto , Toshiyuki Shou , Kenji Sasaki , Yutaka Akiyama
- Applicant: Hidemitsu Mori , Kazuhiro Takimoto , Toshiyuki Shou , Kenji Sasaki , Yutaka Akiyama
- Applicant Address: JP Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Sughrue Mion, PLLC
- Priority: JP2008-276394 20081028
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8238

Abstract:
To provide a semiconductor device in which an interval between first wells can be shortened by improving a separation breakdown voltage between the first wells and a method for manufacturing the same. A semiconductor device includes a first conductivity type semiconductor substrate 1, second conductivity type first wells 2 and 3 disposed on a surface layer of the semiconductor substrate 1 with a predetermined interval between them, a first conductivity type second well 4 disposed between the first wells 2 and 3 on the surface layer of the semiconductor substrate 1 and having an impurity concentration higher than that of the semiconductor substrate, a first conductivity type third well 5 at least disposed below the second well 4 in the semiconductor substrate 1 and having an impurity concentration higher than that of the semiconductor substrate 1 and lower than that of the second well 4, and a first conductivity type fourth well 11 at least disposed below the third well 5 in the semiconductor substrate 1 and having an impurity concentration higher than that of the semiconductor substrate 1 and lower than that of the second well 4.
Public/Granted literature
- US20100102420A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2010-04-29
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