发明授权
US08119242B2 Amorphous carbon film, process for forming amorphous carbon film, conductive member provided with amorphous carbon film, and fuel cell separator
有权
无定形碳膜,无定形碳膜的形成方法,具有无定形碳膜的导电部件和燃料电池分离器
- 专利标题: Amorphous carbon film, process for forming amorphous carbon film, conductive member provided with amorphous carbon film, and fuel cell separator
- 专利标题(中): 无定形碳膜,无定形碳膜的形成方法,具有无定形碳膜的导电部件和燃料电池分离器
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申请号: US12300179申请日: 2007-05-22
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公开(公告)号: US08119242B2公开(公告)日: 2012-02-21
- 发明人: Takashi Iseki , Yuka Yamada , Kazuyuki Nakanishi , Tadashi Oshima , Hiroyuki Mori , Toshio Horie , Ken-ichi Suzuki , Gaku Kitahara
- 申请人: Takashi Iseki , Yuka Yamada , Kazuyuki Nakanishi , Tadashi Oshima , Hiroyuki Mori , Toshio Horie , Ken-ichi Suzuki , Gaku Kitahara
- 申请人地址: JP Aichi-gun
- 专利权人: Kabushiki Kaisha Toyota Chuo Kenkyusho
- 当前专利权人: Kabushiki Kaisha Toyota Chuo Kenkyusho
- 当前专利权人地址: JP Aichi-gun
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2006-141687 20060522
- 国际申请: PCT/JP2007/060765 WO 20070522
- 国际公布: WO2007/136131 WO 20071129
- 主分类号: B32B9/00
- IPC分类号: B32B9/00
摘要:
The amorphous carbon film of the present invention is an amorphous carbon film comprising carbon and hydrogen, wherein the amorphous carbon film contains not more than 30 atomic % (excluding 0%) of hydrogen and, when the entire amount of the carbon is taken as 100 atomic %, carbon having an sp2 hybrid orbital is present in an amount of not less than 70 atomic % and less than 100 atomic %. Conductivity is imparted to an amorphous carbon film by controlling the contents of hydrogen, Csp3 and the like to increase a structure comprising Csp2. This amorphous carbon film can be formed by plasma CVD using a reaction gas containing one or more gases selected from a carbocyclic compound gas containing carbon having an sp2 hybrid orbital, and a heterocyclic compound gas containing carbon having an sp2 hybrid orbital and silicon and/or nitrogen. By forming the amorphous carbon film on a surface of a substrate, a conductive member can be obtained.
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