Invention Grant
- Patent Title: Wafer edge cleaning
- Patent Title (中): 晶圆边缘清洁
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Application No.: US13042085Application Date: 2011-03-07
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Publication No.: US08099817B2Publication Date: 2012-01-24
- Inventor: Joseph Yudovsky , Anne-Douce Coulin , Leon Volfovski
- Applicant: Joseph Yudovsky , Anne-Douce Coulin , Leon Volfovski
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: B08B11/02
- IPC: B08B11/02

Abstract:
In a first aspect, an apparatus for cleaning a thin disk is provided. The apparatus includes a support roller for supporting a rotating wafer within a wafer cleaner. The support roller comprises a guide portion, for receiving an edge of a wafer, having an inclined surface comprising a low-friction material and adapted to allow the wafer edge to slide thereagainst; and an edge-trap portion for retaining the edge of the wafer and having a transverse surface comprising a high-friction material and adapted, when in communication with the edge of the wafer, to resist sliding thereagainst. Numerous other aspects are provided.
Public/Granted literature
- US20110154590A1 WAFER EDGE CLEANING Public/Granted day:2011-06-30
Information query
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