发明授权
US08013980B2 Exposure apparatus equipped with interferometer and exposure apparatus using the same 有权
配备有干涉仪的曝光装置和使用其的曝光装置

Exposure apparatus equipped with interferometer and exposure apparatus using the same
摘要:
An exposure apparatus includes a projection optical system for projecting an exposure pattern, onto an object to be exposed, and a measuring apparatus for measuring, as an interference fringe, optical performance of the projection optical system, wherein the measuring apparatus includes an optical element having opposing first and second surfaces, wherein the first surface has a first measurement pattern, and the second surface has a second measurement pattern and is closer to the projection optical system than the first measurement pattern, and wherein the measuring apparatus introduces light into the projection optical system via first and second measurement patterns.
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