发明授权
- 专利标题: Exposure apparatus equipped with interferometer and exposure apparatus using the same
- 专利标题(中): 配备有干涉仪的曝光装置和使用其的曝光装置
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申请号: US11956747申请日: 2007-12-14
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公开(公告)号: US08013980B2公开(公告)日: 2011-09-06
- 发明人: Yoshinori Ohsaki
- 申请人: Yoshinori Ohsaki
- 申请人地址: JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2004-253948 20040901
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03B27/68 ; G03B27/42
摘要:
An exposure apparatus includes a projection optical system for projecting an exposure pattern, onto an object to be exposed, and a measuring apparatus for measuring, as an interference fringe, optical performance of the projection optical system, wherein the measuring apparatus includes an optical element having opposing first and second surfaces, wherein the first surface has a first measurement pattern, and the second surface has a second measurement pattern and is closer to the projection optical system than the first measurement pattern, and wherein the measuring apparatus introduces light into the projection optical system via first and second measurement patterns.
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