发明授权
- 专利标题: Method and apparatus for probe card alignment in a test system
- 专利标题(中): 测试系统中探针卡校准的方法和设备
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申请号: US12431271申请日: 2009-04-28
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公开(公告)号: US07977956B2公开(公告)日: 2011-07-12
- 发明人: Keith J. Breinlinger , Benjamin N. Eldridge , Eric D. Hobbs , Douglas S. Ondricek
- 申请人: Keith J. Breinlinger , Benjamin N. Eldridge , Eric D. Hobbs , Douglas S. Ondricek
- 申请人地址: US CA Livermore
- 专利权人: FormFactor, Inc.
- 当前专利权人: FormFactor, Inc.
- 当前专利权人地址: US CA Livermore
- 代理机构: Kirton & McConkie
- 主分类号: G01R31/00
- IPC分类号: G01R31/00 ; G01R31/20
摘要:
Embodiments of methods and apparatus for aligning a probe card assembly in a test system are provided herein. In some embodiments, an apparatus for testing devices may include a probe card assembly having a plurality of probes, each probe having a tip for contacting a device to be tested, and having an identified set of one or more features that are preselected in accordance with selected criteria for aligning the probe card assembly within a prober after installation therein. In some embodiments, the identity of the identified set of one or more features may be communicated to the prober to facilitate a global alignment of the probe card assembly that minimizes an aggregate misalignment of all of the tips in the probe card assembly.
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