发明授权
- 专利标题: Hidden micromirror support structure
- 专利标题(中): 隐藏的微镜支撑结构
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申请号: US12419103申请日: 2009-04-06
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公开(公告)号: US07924489B2公开(公告)日: 2011-04-12
- 发明人: David A. Rothenbury
- 申请人: David A. Rothenbury
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 代理商 Charles A. Brill; Wade James Brady, III; Frederick J. Telecky, Jr.
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; C23C14/00 ; B29D11/00
摘要:
Methods and apparatus for use with a micromirror element includes a micromirror a micromirror having a substantially flat outer surface disposed outwardly from a support structure that is operable to at least partially support the micromirror. The support structure includes at least one layer overlying at least two discrete planes that are both substantially parallel to the outer surface of the micromirror. In one particular embodiment, the support structure includes annular-shaped sidewalls that encapsulate a photoresist plug.
公开/授权文献
- US20090188786A1 Hidden Micromirror Support Structure 公开/授权日:2009-07-30
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