发明授权
- 专利标题: Method for testing a photomask
- 专利标题(中): 光掩模测试方法
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申请号: US10906564申请日: 2005-02-24
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公开(公告)号: US07914949B2公开(公告)日: 2011-03-29
- 发明人: Jed H. Rankin
- 申请人: Jed H. Rankin
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Robert A. Walsh; Daryl Neff
- 主分类号: G03F1/00
- IPC分类号: G03F1/00
摘要:
A method, a recording medium and an apparatus for testing a photomask are provided. In the disclosed method, a particular region of a photomask is selected, either from a physical instance of the photomask, or from the photomask as represented by a digital representation thereof. The particular region is then characterized by identifying a pattern type present in the particular region. A lithographic process stress condition is determined for the particular region, considering the pattern type, and thereafter, a result of lithographically patterning a feature is determined by simulating a photolithographic exposure, using the particular region of the photomask under the lithographic process stress condition. Then, it is decided whether the particular region of the photomask is acceptable based on the result of the simulated exposure only under the lithographic process stress condition.
公开/授权文献
- US20060190196A1 METHOD AND APPARATUS FOR TESTING A PHOTOMASK 公开/授权日:2006-08-24
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