The present invention presents a hybrid approach for manufacturability analysis that integrates both a rules-based approach and a models-based approach. For example, a rules-based analysis can be used to optimize the performance of a model-based analysis. The rules analysis can be used to identify specific areas of a layout that can then be analyzed in detail using models. This approach provides numerous advantages. It allows the models-based analysis tool to concentrate upon portions of the layout that requires greater attention and allocate fewer resources towards the areas less critical to the yield.