发明授权
- 专利标题: Light emitting device, method for manufacturing thereof and electronic appliance
- 专利标题(中): 发光装置及其制造方法及电子设备
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申请号: US11709062申请日: 2007-02-22
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公开(公告)号: US07829894B2公开(公告)日: 2010-11-09
- 发明人: Satoshi Murakami , Masayuki Sakakura
- 申请人: Satoshi Murakami , Masayuki Sakakura
- 申请人地址: JP Atsugi-shi, Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi-shi, Kanagawa-ken
- 代理机构: Robinson Intellectual Property Law Office, P.C.
- 代理商 Eric J. Robinson
- 优先权: JP2004-089213 20040325
- 主分类号: H01L29/04
- IPC分类号: H01L29/04 ; H01L31/20 ; H01L31/036 ; H01L31/0376
摘要:
An object of the invention is to provide a method for manufacturing a light emitting device capable of reducing deterioration of elements due to electrostatic charge caused in manufacturing the light emitting device. Another object of the invention is to provide a light emitting device in which defects due to the deterioration of elements caused by the electrostatic charge are reduced. The method for manufacturing the light emitting device includes a step of forming a top-gate type transistor for driving a light emitting element. In the step of forming the top-gate type transistor, when processing a semiconductor layer, a first grid-like semiconductor layer extending in rows and columns is formed over a substrate. The plurality of second island-like semiconductor layers are formed between the first semiconductor layer. The plurality of second island-like second semiconductor layers serve as an active layer of the transistor.
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