Invention Grant
- Patent Title: Semiconductor device
- Patent Title (中): 半导体器件
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Application No.: US12354423Application Date: 2009-01-15
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Publication No.: US07804313B2Publication Date: 2010-09-28
- Inventor: Hiroaki Takasu , Sukehiro Yamamoto
- Applicant: Hiroaki Takasu , Sukehiro Yamamoto
- Applicant Address: JP Chiba
- Assignee: Seiko Instruments, Inc.
- Current Assignee: Seiko Instruments, Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2006-166879 20060616
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/26 ; G01R11/18

Abstract:
Provided is a semiconductor device, in which: patterns for detecting displacement at probing are formed of a plurality of minute conductors formed below a protective film; each of the plurality of minute conductors formed below the protective film is electrically insulated and formed to be smaller than a bottom surface of a tip of a probing needle used for carrying out an electrical measurement of IC chips; and the patterns for detecting displacement at probing are provided in a pair for each of the IC chips.
Public/Granted literature
- US20090121223A1 SEMICONDUCTOR DEVICE Public/Granted day:2009-05-14
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