Invention Grant
- Patent Title: Flexible membrane for carrier head
- Patent Title (中): 用于载体头的柔性膜
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Application No.: US11741692Application Date: 2007-04-27
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Publication No.: US07727055B2Publication Date: 2010-06-01
- Inventor: Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
- Applicant: Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B5/35
- IPC: B24B5/35
Abstract:
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
Public/Granted literature
- US20080119122A1 Flexible Membrane for Carrier Head Public/Granted day:2008-05-22
Information query
