发明授权
- 专利标题： Formation of microspheres through laser irradiation of a surface
- 专利标题（中）： 通过激光照射表面形成微球
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申请号： US12172366申请日： 2008-07-14
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公开(公告)号： US07700032B1公开(公告)日： 2010-04-20
- 发明人: Ryan P. Lu , Ayax D. Ramirez , Ozzie Csanadi , Stephen D. Russell
- 申请人： Ryan P. Lu , Ayax D. Ramirez , Ozzie Csanadi , Stephen D. Russell
- 申请人地址： US DC Washington
- 专利权人： The United States of America as represented by the Secretary of the Navy
- 当前专利权人： The United States of America as represented by the Secretary of the Navy
- 当前专利权人地址： US DC Washington
- 代理商 Kyle Eppele; J. Eric Anderson
- 主分类号： B23K26/00
- IPC分类号： B23K26/00 ; H01L21/312
摘要：
A laser ablation process is applied to a semiconductor substrate causing the semiconductor material surface and subsurface to be superheated to the point where material is ablated from the material substrate. Optional subsequent laser pulse(s) liquefy the particles, preferably while suspended in air, and the material surface tension causes the liquefied droplet of semiconductor material to form a sphere. The droplet preferably solidifies in air before reaching the substrate of its origin or another substrate for collection.
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