发明授权
- 专利标题: Method of detaching a thin film by melting precipitates
- 专利标题(中): 通过熔融沉淀物分离薄膜的方法
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申请号: US12293193申请日: 2007-03-28
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公开(公告)号: US07670930B2公开(公告)日: 2010-03-02
- 发明人: Aurélie Tauzin , Bruce Faure , Arnaud Garnier
- 申请人: Aurélie Tauzin , Bruce Faure , Arnaud Garnier
- 申请人地址: FR Paris FR Bernin
- 专利权人: Commissariat a l 'Energie Atomique,S.O.I. Tec-Silicon on Insulator Technologies
- 当前专利权人: Commissariat a l 'Energie Atomique,S.O.I. Tec-Silicon on Insulator Technologies
- 当前专利权人地址: FR Paris FR Bernin
- 代理机构: Brinks Hofer Gilson & Lione
- 优先权: FR0651088 20060329
- 国际申请: PCT/FR2007/000534 WO 20070328
- 国际公布: WO2007/110515 WO 20071004
- 主分类号: H01L21/46
- IPC分类号: H01L21/46 ; H01L21/31 ; H01L21/469
摘要:
A method of fabricating a thin film from a substrate includes implantation into the substrate, for example made of silicon, of ions of a non-gaseous species, for example gallium, the implantation conditions and this species being chosen, according to the material of the substrate, so as to allow the formation of precipitates confined in a certain depth, distributed within a layer, these precipitates being made of a solid phase having a melting point below that of the substrate. The method optionally further including intimate contacting of this face of the substrate with a stiffener, and detachment of a thin film by fracturing the substrate at the layer of precipitates by applying a mechanical and/or chemical detachment stress under conditions in which the precipitates are in the liquid phase.
公开/授权文献
- US20090061594A1 METHOD OF DETACHING A THIN FILM BY MELTING PRECIPITATES 公开/授权日:2009-03-05
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