发明授权
- 专利标题： Heater unit and semiconductor manufacturing apparatus including the same
- 专利标题（中）： 加热器单元和包括其的半导体制造装置
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申请号： US11518878申请日： 2006-09-12
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公开(公告)号： US07554059B2公开(公告)日： 2009-06-30
- 发明人: Tomoyuki Awazu , Akira Mikumo , Masuhiro Natsuhara , Hirohiko Nakata
- 申请人： Tomoyuki Awazu , Akira Mikumo , Masuhiro Natsuhara , Hirohiko Nakata
- 申请人地址： JP Osaka
- 专利权人： Sumitomo Electric Industries, Ltd.
- 当前专利权人： Sumitomo Electric Industries, Ltd.
- 当前专利权人地址： JP Osaka
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2005-263183 20050912
- 主分类号： H05B3/68
- IPC分类号： H05B3/68 ; F26B19/00
摘要：
A ceramic heater attaining more uniform temperature distribution from the start to the end of cooling is provided. Further, in a cooling module used for cooling the heater, liquid leakage during use is prevented, degradation in cooling capability is prevented and the performance is maintained for a long period of use, and the manufacturing cost of the module is decreased. The ceramic heater includes a ceramic heater body and a cooling module cooling the heater body, and the cooling module has a structure formed by arranging a pipe in a trench formed in a plate-shaped structure.
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