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US07033938B2 Method of making a long wavelength indium gallium arsenide nitride (InGaAsN) active region 失效
制造长波长砷化铟镓(InGaAsN)活性区域的方法

Method of making a long wavelength indium gallium arsenide nitride (InGaAsN) active region
摘要:
The active region of a long-wavelength light emitting device is made by providing an organometallic vapor phase epitaxy (OMVPE) reactor, placing a substrate wafer capable of supporting growth of indium gallium arsenide nitride in the reactor, supplying a Group III–V precursor mixture comprising an arsenic precursor, a nitrogen precursor, a gallium precursor, an indium precursor and a carrier gas to the reactor and pressurizing the reactor to a sub-atmospheric elevated growth pressure no higher than that at which a layer of indium gallium arsenide layer having a nitrogen fraction commensurate with light emission at a wavelength longer than 1.2 μm is deposited over the substrate wafer.
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