发明授权
US07033938B2 Method of making a long wavelength indium gallium arsenide nitride (InGaAsN) active region
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制造长波长砷化铟镓(InGaAsN)活性区域的方法
- 专利标题: Method of making a long wavelength indium gallium arsenide nitride (InGaAsN) active region
- 专利标题(中): 制造长波长砷化铟镓(InGaAsN)活性区域的方法
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申请号: US10785747申请日: 2004-02-23
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公开(公告)号: US07033938B2公开(公告)日: 2006-04-25
- 发明人: David P. Bour , Tetsuya Takeuchi , Ashish Tandon , Ying-Lan Chang , Michael R. T. Tan , Scott W. Corzine
- 申请人: David P. Bour , Tetsuya Takeuchi , Ashish Tandon , Ying-Lan Chang , Michael R. T. Tan , Scott W. Corzine
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
The active region of a long-wavelength light emitting device is made by providing an organometallic vapor phase epitaxy (OMVPE) reactor, placing a substrate wafer capable of supporting growth of indium gallium arsenide nitride in the reactor, supplying a Group III–V precursor mixture comprising an arsenic precursor, a nitrogen precursor, a gallium precursor, an indium precursor and a carrier gas to the reactor and pressurizing the reactor to a sub-atmospheric elevated growth pressure no higher than that at which a layer of indium gallium arsenide layer having a nitrogen fraction commensurate with light emission at a wavelength longer than 1.2 μm is deposited over the substrate wafer.
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