Invention Grant
US06949719B2 Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator
失效
具有蜂窝结构的绝热体和使用该热绝缘体的热循环系统
- Patent Title: Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator
- Patent Title (中): 具有蜂窝结构的绝热体和使用该热绝缘体的热循环系统
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Application No.: US10831111Application Date: 2004-04-26
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Publication No.: US06949719B2Publication Date: 2005-09-27
- Inventor: Osamu Suenaga , Wataru Okase , Takenobu Matsuo
- Applicant: Osamu Suenaga , Wataru Okase , Takenobu Matsuo
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: JP2000-402104 20001228; JP2001-386110 20011219
- Main IPC: F27D1/00
- IPC: F27D1/00 ; F27D17/00 ; F28F13/14 ; H01L21/22 ; F27B5/14

Abstract:
A thermal insulator can change a heat insulation characteristic partially with a simple structure. The thermal insulator is divided into a plurality of parts in accordance with a temperature of a heat source which is insulated by the thermal insulator. The plurality of parts are formed of different honeycomb structures, respectively, so as to provide different heat insulation characteristics. The plurality of parts may be formed by different materials, or a shape or dimension such as a cell pitch of the honeycomb structure may be varied. Heat is collected from air within the honeycomb cells, and is transferred to other parts for heating.
Public/Granted literature
- US20040195230A1 Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator Public/Granted day:2004-10-07
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