Invention Grant
US06919570B2 Electron beam sensor 失效
电子束传感器

Electron beam sensor
Abstract:
A sensing device for sensing an electron beam includes a vacuum chamber having an electron permeable window for allowing electrons from the electron beam to enter vacuum chamber. An electrode extends within the vacuum chamber for receiving at least a portion of the electrons entering the vacuum chamber. The intensity of the electron beam is capable of being determined from the amount of electrons received by the electrode.
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