发明授权
- 专利标题: Pressure detecting apparatus with metallic diaphragm
- 专利标题(中): 带金属隔膜的压力检测装置
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申请号: US09492605申请日: 2000-01-27
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公开(公告)号: US06595065B2公开(公告)日: 2003-07-22
- 发明人: Yukihiko Tanizawa , Kazuaki Hamamoto , Inao Toyoda , Hiroaki Tanaka , Yasutoshi Suzuki
- 申请人: Yukihiko Tanizawa , Kazuaki Hamamoto , Inao Toyoda , Hiroaki Tanaka , Yasutoshi Suzuki
- 主分类号: G01L904
- IPC分类号: G01L904
摘要:
A pressure detecting apparatus has a single-crystal semiconductor sensor chip disposed on a metallic diaphragm through a low melting point glass. The sensor chip has a planar shape selected from a circular shape, a first polygonal shape having more than five sides and having interior angles all less than 180°, and a second polygonal shape having a ratio of a circumscribed circle diameter relative to an inscribed circle diameter being less than 1.2. Four strain gauge resistors are disposed on X, Y axes passing through a center point O of the sensor chip in parallel with directions. Accordingly, thermal stress is reduced not to adversely affect a detection error and simultaneously high sensitivity is provided.
公开/授权文献
- US20010039837A1 Pressure detecting apparatus with metallic diaphragm 公开/授权日:2001-11-15
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