Invention Grant
US06500971B2 Ester compounds having alicyclic and oxirane structures and method for preparing the same
有权
具有脂环和环氧乙烷结构的酯化合物及其制备方法
- Patent Title: Ester compounds having alicyclic and oxirane structures and method for preparing the same
- Patent Title (中): 具有脂环和环氧乙烷结构的酯化合物及其制备方法
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Application No.: US09873193Application Date: 2001-06-05
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Publication No.: US06500971B2Publication Date: 2002-12-31
- Inventor: Takeru Watanabe , Takeshi Kinsho , Koji Hasegawa , Tsunehiro Nishi , Mutsuo Nakashima , Seiichiro Tachibana , Jun Hatakeyama
- Applicant: Takeru Watanabe , Takeshi Kinsho , Koji Hasegawa , Tsunehiro Nishi , Mutsuo Nakashima , Seiichiro Tachibana , Jun Hatakeyama
- Priority: JP2000-169357 20000606
- Main IPC: C07D30316
- IPC: C07D30316
Abstract:
An ester compound of formula (1) is provided. R1 is H or methyl, R2 is tertiary C4-20 alkyl, and k=0 or 1. A resist composition comprising as the base resin a polymer resulting from the ester compound is sensitive to high-energy radiation, has excellent sensitivity, resolution, etching resistance and substrate adhesion, and is suited for micropatterning using electron beams or deep-UV.
Public/Granted literature
- US20020035279A1 Novel ester compounds having alicyclic and oxirane structures and method for preparing the same Public/Granted day:2002-03-21
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