发明授权
- 专利标题: Fractionated novolak resin and photoresist composition therefrom
- 专利标题(中): 分馏的酚醛清漆树脂及其光致抗蚀剂组合物
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申请号: US128900申请日: 1998-08-04
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公开(公告)号: US5977288A公开(公告)日: 1999-11-02
- 发明人: M. Dalil Rahman , Ping-Hung Lu
- 申请人: M. Dalil Rahman , Ping-Hung Lu
- 申请人地址: VGX
- 专利权人: Clariant Finance (BVI) Limited
- 当前专利权人: Clariant Finance (BVI) Limited
- 当前专利权人地址: VGX
- 主分类号: C08G8/00
- IPC分类号: C08G8/00 ; C08G8/08 ; C08G16/02 ; C08L61/06 ; G03F7/023 ; C08G8/04 ; C08G18/04
摘要:
The present invention provides a method for producing a film forming, fractionated novolak resin having consistent molecular weight and superior performance in photoresist composition, by isolating such novolak resin fractions without high temperature distillation. A method is also provided for producing photoresist composition from such a fractionated novolak resin and for producing semiconductor devices using such a photoresist composition.
公开/授权文献
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