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US5977288A Fractionated novolak resin and photoresist composition therefrom 失效
分馏的酚醛清漆树脂及其光致抗蚀剂组合物

Fractionated novolak resin and photoresist composition therefrom
摘要:
The present invention provides a method for producing a film forming, fractionated novolak resin having consistent molecular weight and superior performance in photoresist composition, by isolating such novolak resin fractions without high temperature distillation. A method is also provided for producing photoresist composition from such a fractionated novolak resin and for producing semiconductor devices using such a photoresist composition.
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