发明授权
US5962185A Polymer for positive photoresist and chemical amplified positive
photoresist composition containing the same
失效
用于正性光致抗蚀剂的聚合物和含有该光致抗蚀剂的化学扩增的正性光致抗蚀剂组合物
- 专利标题: Polymer for positive photoresist and chemical amplified positive photoresist composition containing the same
- 专利标题(中): 用于正性光致抗蚀剂的聚合物和含有该光致抗蚀剂的化学扩增的正性光致抗蚀剂组合物
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申请号: US938925申请日: 1997-09-26
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公开(公告)号: US5962185A公开(公告)日: 1999-10-05
- 发明人: Joo-Hyeon Park , Seong-Ju Kim , Ji-Hong Kim , Ki-Dae Kim
- 申请人: Joo-Hyeon Park , Seong-Ju Kim , Ji-Hong Kim , Ki-Dae Kim
- 申请人地址: KRX Seoul
- 专利权人: Korea Kumho Petrochemical Co., Ltd.
- 当前专利权人: Korea Kumho Petrochemical Co., Ltd.
- 当前专利权人地址: KRX Seoul
- 优先权: KRX96-41437 19960921
- 主分类号: C08F212/04
- IPC分类号: C08F212/04 ; C07C69/736 ; C08F216/10 ; C08F220/30 ; G03C1/00 ; G03F7/004 ; G03F7/039 ; H01L21/027
摘要:
A positive chemical amplified photoresist composition having as a matrix resin a polymer having the repeating unit of Formula (I) and a photoacid generator. The polymer ranges, in polystyrene-reduced weight average molecular weight, from about 2,000 to 1,000,000. The photoresist composition is possible to develop in alkali and shows excellent sensitivity, resolution and transmissivity to deep uv light in addition to being superior in storage preservativity. The repeating unit of Formula (I) is: ##STR1## wherein, R.sub.2, R.sub.2 and R.sub.3 are independently represented by a hydrogen atom or a methyl group; R.sub.4 is a hydrogen atom, an alkyl group or an alkoxy group; R.sub.5 is functions as an acid-labile protective group and is selected from a t-butyl group, a tetrahydropyranyl group or an alkoxymethylene group; j is an integer of 1-8; k is an integer of 0-8; and 1, m and n each represent a mole ratio, satisfying the condition of l+m+n=1 where 0
公开/授权文献
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