发明授权
- 专利标题： Optical system
- 专利标题（中）： 光学系统
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申请号： US841413申请日： 1997-04-22
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公开(公告)号： US5920073A公开(公告)日： 1999-07-06
- 发明人: Chiwoei Wayne Lo , William K. Lo
- 申请人： Chiwoei Wayne Lo , William K. Lo
- 申请人地址： CA San Jose
- 专利权人： Schlumberger Technologies, Inc.
- 当前专利权人： Schlumberger Technologies, Inc.
- 当前专利权人地址： CA San Jose
- 主分类号： G21K1/00
- IPC分类号： G21K1/00 ; H01J37/04 ; H01J37/09
摘要：
An optical system for a particle beam device such as an electron microscope, e-beam device or FIB device, including a particle beam column having an optical axis along which a beam of particles is projected and an apertured plate positioned in the column having an aperture which is coaxial with the optical axis, the plate being moveable in a direction which is parallel to the optical axis.
公开/授权文献
- US5197587A Conveyor belt scraping apparatus 公开/授权日：1993-03-30
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