Invention Grant
- Patent Title: Fabrication system and method having inter-apparatus transporter
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Application No.: US713192Application Date: 1996-09-12
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Publication No.: US5820679APublication Date: 1998-10-13
- Inventor: Natsuki Yokoyama , Yoshifumi Kawamoto , Eiichi Murakami , Fumihiko Uchida , Kenichi Mizuishi , Yoshio Kawamura
- Applicant: Natsuki Yokoyama , Yoshifumi Kawamoto , Eiichi Murakami , Fumihiko Uchida , Kenichi Mizuishi , Yoshio Kawamura
- Applicant Address: JPX Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JPX Tokyo
- Priority: JPX5-175114 19930715; JPX5-215489 19930831
- Main IPC: B65G49/07
- IPC: B65G49/07 ; B23Q41/00 ; B23Q41/02 ; C23C14/56 ; C23C16/54 ; G05B19/418 ; H01L21/00 ; H01L21/02 ; H01L21/027 ; H01L21/205 ; H01L21/285 ; H01L21/304 ; H01L21/3065 ; H01L21/3205 ; H01L21/677 ; H01L21/68 ; C23C16/00
Abstract:
Disclosed is a fabricating system including a plurality of processing apparatuses connected to each other by means of an inter-apparatus transporter, wherein one group of semiconductor wafers are processed in processing apparatuses and other group of wafers are transported to specified processing apparatuses for a time interval from (To+T) to a time To; and another group of wafers are processed and the remaining group of wafers are transported for a time interval from (To+T) to (To+2T). Since processing apparatuses can receive at least one of works from the inter-apparatus transporter for a time interval T min, the distribution of works from the transporter to processing apparatuses is completed for the time interval T min. The transporter is emptied for each time interval T min, and works are unloaded to the emptied transporter, which makes easy the scheduling, control and management of the transporting of a plurality of works in the fabricating system. Moreover, since the fabricating system including processing apparatuses is periodically controlled at a cycle time T min, the scheduling of a plurality of works can be made easy, to enhance the level of optimization, thus improving the productivity.
Public/Granted literature
- US5185491A Method for processing a waveform Public/Granted day:1993-02-09
Information query
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