Invention Grant
- Patent Title: Etching solution for copper or copper alloy
- Patent Title (中): 铜或铜合金蚀刻溶液
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Application No.: US510299Application Date: 1995-08-02
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Publication No.: US5700389APublication Date: 1997-12-23
- Inventor: Toshiko Nakagawa
- Applicant: Toshiko Nakagawa
- Applicant Address: JPX Amagasaki
- Assignee: MEC Co., Ltd.
- Current Assignee: MEC Co., Ltd.
- Current Assignee Address: JPX Amagasaki
- Priority: JPX6-210732 19940812
- Main IPC: C23F1/18
- IPC: C23F1/18 ; C23G1/10 ; H05K3/06 ; H05K3/28 ; H05K3/38 ; C23F3/00 ; C23F1/00
Abstract:
An etching solution for copper or copper alloys comprising, (a) sulfuric acid, (b) a persulfate, (c) at least one compound selected from imidazole, imidazole derivatives, pyridine derivatives, triazine, and triazine derivatives, and (d) water. The etching solution exhibits a high etching speed and does not oxidize the copper surfaces after etching.
Public/Granted literature
- US4796990A Method and apparatus for superimposing scenes Public/Granted day:1989-01-10
Information query
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