发明授权
US5583360A Vertically formed neuron transister having a floating gate and a control
gate
失效
具有浮动栅极和控制栅极的垂直形成的神经元转运器
- 专利标题: Vertically formed neuron transister having a floating gate and a control gate
- 专利标题(中): 具有浮动栅极和控制栅极的垂直形成的神经元转运器
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申请号: US520363申请日: 1995-08-28
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公开(公告)号: US5583360A公开(公告)日: 1996-12-10
- 发明人: Scott S. Roth , William C. McFadden , Alexander J. Pepe
- 申请人: Scott S. Roth , William C. McFadden , Alexander J. Pepe
- 申请人地址: IL Schaumburg
- 专利权人: Motorola Inc.
- 当前专利权人: Motorola Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247 ; H01L27/115 ; H01L27/108 ; H01L29/76 ; H01L29/788
摘要:
A method for forming a vertical neuron MOSFET begins by providing a substrate (12). One or more conductive layers (24 and 28) are formed overlying the substrate (12). An opening (32) is formed through a portion of the conductive layers (24 and 28) to form one or more control electrodes from the conductive layers (24 and 28). A floating gate (36, and 38) is formed adjacent each of the control electrodes. A dielectric layer (34) is formed within the opening (32) and between the control electrodes and the floating gate (36, and 38) to provide for capacitive coupling between the control electrodes and the floating gate (36, and 38). The capacitive coupling may be altered for each control electrode via isotropic sidewall etching and other methods. By forming the neuron MOSFET in a vertical manner, a surface area of the neuron MOSFET is reduced when compared to known neuron MOSFET structures.
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