发明授权
- 专利标题： Rapid thermal heating apparatus and method utilizing plurality of light pipes
- 专利标题（中）： 快速热加热装置和利用多个光管的方法
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申请号： US131830申请日： 1993-10-05
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公开(公告)号： US5487127A公开(公告)日： 1996-01-23
- 发明人: Christian M. Gronet , James F. Gibbons
- 申请人： Christian M. Gronet , James F. Gibbons
- 申请人地址： CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： C23C16/48
- IPC分类号： C23C16/48 ; C30B25/10 ; C30B31/12 ; C30B31/18 ; F27B17/00 ; F27D99/00 ; G01J5/00 ; G01J5/06 ; H01L21/00 ; H02G3/04 ; H05B3/40 ; C23C16/00
摘要：
A rapid thermal heating apparatus in which lamps are disposed in a plurality of light pipes arranged to illuminate and supply heat to a substrate. The light pipes are positioned so that the illumination patterns overlap. The energy supplied to the lamps is controlled to provide a predetermined heating pattern to the substrate. A liquid cooled window cooperates with the light pipes to transmit energy to a wafer disposed in an evacuated chamber.
公开/授权文献
- US6087744A Electrical machine 公开/授权日：2000-07-11
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