Invention Grant
- Patent Title: Single crystal pulling apparatus
- Patent Title (中): 单晶拉丝机
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Application No.: US961764Application Date: 1992-10-15
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Publication No.: US5373805APublication Date: 1994-12-20
- Inventor: Kiyotaka Takano , Izumi Fusegawa , Hirotoshi Yamagishi
- Applicant: Kiyotaka Takano , Izumi Fusegawa , Hirotoshi Yamagishi
- Applicant Address: JPX Tokyo
- Assignee: Shin-Etsu Handotai Co., Ltd.
- Current Assignee: Shin-Etsu Handotai Co., Ltd.
- Current Assignee Address: JPX Tokyo
- Priority: JPX3-298028 19911017; JPX3-310106 19911030
- Main IPC: C30B15/00
- IPC: C30B15/00 ; C30B15/14 ; C30B15/20
Abstract:
A single crystal pulling apparatus based on Czochralski technique having a conduit for continuously supplying granular polycrystal material to the crucible and a vertical purge tube suspended centrally into the heating chamber, wherein the purge tube is vertically shiftable; a heat shield ring is connected to the lower end of the purge tube, and a cylindrical quartz partition ring made of a quartz glass containing no bubbles is held vertically by the heat shield ring in a manner such that the lower end of the quartz partition ring comes substantially lower than the lower end of the purge tube so that, by being dipped in the polycrystal melt, the partition ring isolates the interior surface of the melt from the exterior surface of the melt, over which latter the granular polycrystal material is poured.
Information query
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