发明授权
- 专利标题: Confocal method and apparatus for focusing in projection lithography
- 专利标题(中): 用于聚焦投影光刻的共焦方法和装置
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申请号: US939208申请日: 1992-09-01
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公开(公告)号: US5306902A公开(公告)日: 1994-04-26
- 发明人: Douglas S. Goodman
- 申请人: Douglas S. Goodman
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: G02B7/28
- IPC分类号: G02B7/28 ; G02B21/00 ; G03F7/207 ; G03F9/00 ; G03F9/02 ; H01L21/027 ; H01L21/30 ; G01V1/20
摘要:
A through-the-lens method and system for focusing a projected image onto an imaging surface employs a confocal process and apparatus. Electromagnetic radiation projected through a subresolution aperture of origin located in an object plane passes through a confocal imaging device which forms an image of the aperture in the image plane. The radiation strikes the surface and is reflected back through the confocal imaging device to the aperture. The power of reflected radiation passing through the aperture is detected/measured. The distance between the imaging surface and the imaging device is then adjusted to maximize the detected power.
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