发明授权
- 专利标题: Process for plasma deposition of a carbon rich coating
- 专利标题(中): 用于等离子体沉积富碳涂层的方法
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申请号: US40837申请日: 1993-03-31
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公开(公告)号: US5286534A公开(公告)日: 1994-02-15
- 发明人: Gunter A. Kohler , Richard W. Duerst , Daniel P. Stubbs
- 申请人: Gunter A. Kohler , Richard W. Duerst , Daniel P. Stubbs
- 申请人地址: MN St. Paul
- 专利权人: Minnesota Mining and Manufacturing Company
- 当前专利权人: Minnesota Mining and Manufacturing Company
- 当前专利权人地址: MN St. Paul
- 主分类号: C23C16/50
- IPC分类号: C23C16/50 ; C23C16/26 ; C23C16/513 ; G11B5/72 ; G11B5/725 ; G11B5/84 ; B05D3/06
摘要:
The present invention provides a magnetic recording medium that includes a polymeric flexible substrate and a magnetic layer coating thereon, with a binderless carbon rich layer adhered to the magnetic layer.The present invention also provides a process for the plasma deposition of the carbon rich coating onto a magnetic medium comprising the steps of:a. providing a magnetic medium in a vacuum chamber;b. generating carbon rich plasma in the vacuum chamber by injecting a plasma gas suitable to provide a carbon rich coating into an elongated hollow cathode; and providing a sufficient voltage to create and maintain plasma; and maintaining a vacuum in the vacuum chamber sufficient for the plasma; andc. exposing the magnetic medium to the plasma while the magnetic medium is influenced by a radio frequency bias electrode to accelerate the plasma towards the magnetic medium and deposit the carbon rich coating on the magnetic medium.
公开/授权文献
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