发明授权
- 专利标题： Method of and apparatus for testing a two dimensional pattern
- 专利标题（中）： 用于测试二维图案的方法和装置
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申请号： US590440申请日： 1975-06-26
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公开(公告)号： US4006296A公开(公告)日： 1977-02-01
- 发明人: Christopher Ernest Peterson
- 申请人： Christopher Ernest Peterson
- 申请人地址： NY New York
- 专利权人： U.S. Philips Corporation
- 当前专利权人： U.S. Philips Corporation
- 当前专利权人地址： NY New York
- 优先权： NL7409850 19740722
- 主分类号： G01B11/24
- IPC分类号： G01B11/24 ; G01B11/245 ; H01L21/66 ; H04N7/18 ; H04N7/02
摘要：
A method of and apparatus for testing a two dimensional pattern uses a pair of pick-up devices for scanning a reference pattern and the pattern to be tested. The reference pattern is modified relative to the test pattern and includes three types of pattern traces, i.e. narrow black traces, narrow bright traces and intermediate wide grey traces. The pattern is tested by means of the narrow traces only thereby minimizing positioning and scanning problems.
公开/授权文献
- US5022652A Lightweight steel golf shaft 公开/授权日：1991-06-11
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