Invention Application
- Patent Title: ADJUSTABLE EDGE RING TILT FOR EDGE OF WAFER SKEW COMPENSATION
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Application No.: US18212672Application Date: 2023-06-21
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Publication No.: US20240429089A1Publication Date: 2024-12-26
- Inventor: Peter MURAOKA , Sumanth BANDA , Andreas SCHMID , Sunil SRINIVASAN , Paul Z. WIRTH
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/687
- IPC: H01L21/687 ; G05B15/02 ; H01J37/32 ; H01L21/3065

Abstract:
Embodiments described herein generally related to a substrate processing chamber and a method of processing substrate in a processing chamber. In one embodiment, a method of using a process kit for a substrate processing chamber disclosed herein. The method begins by positioning the substrate on a substrate support disposed in the substrate processing chamber. A plasma is formed above the substrate and a tilt and height of an edge ring is adjusted with a controller. The controller is coupled to a movement assembly having one of three linear actuators for tilting a sliding ring interfaced with the edge ring to change a direction of ions at one edge of the substrate.
Information query
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