Invention Publication
- Patent Title: AN ILLUMINATION SOURCE AND ASSOCIATED METHOD APPARATUS
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Application No.: US18570289Application Date: 2022-05-20
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Publication No.: US20240272516A1Publication Date: 2024-08-15
- Inventor: Sjoerd Nicolaas Lambertus DONDERS , Petrus Wilhelmus SMORENBURG
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP 179230.4 2021.06.14 EP 190842.1 2021.08.11
- International Application: PCT/EP2022/063726 2022.05.20
- Date entered country: 2023-12-14
- Main IPC: G02F1/383
- IPC: G02F1/383

Abstract:
An assembly for receiving a pump radiation to interact with a gas medium at an interaction space to generate an emitted radiation. The assembly comprising: an object with a hollow core, wherein the hollow core has an elongated volume through the object, wherein the interaction space is located inside the hollow core, and a heat conductive structure that connects at multiple locations of an outside wall of the object for transferring heat generated at the interaction space away from the object.
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