- 专利标题: METHOD FOR DETERMINING A POSITION OF AN OBJECT IN A BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND BEAM APPARATUS FOR CARRYING OUT THE METHOD
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申请号: US18522313申请日: 2023-11-29
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公开(公告)号: US20240258068A1公开(公告)日: 2024-08-01
- 发明人: Josef Biberger
- 申请人: Carl Zeiss Microscopy GmbH
- 申请人地址: DE Jena
- 专利权人: Carl Zeiss Microscopy GmbH
- 当前专利权人: Carl Zeiss Microscopy GmbH
- 当前专利权人地址: DE Jena
- 优先权: DE 2022132951.8 2022.12.12
- 主分类号: H01J37/304
- IPC分类号: H01J37/304 ; H01J37/22 ; H01J37/28
摘要:
The invention relates to a method for determining a position of an object in a beam apparatus which has a processor unit and which is used for processing, imaging and/or analyzing an object. The method has the following steps: (i) providing firstly a predefinable region of an object and secondly a marking in the beam apparatus, wherein the predefinable region has a first position in relation to the marking, and wherein the first position is given by a first distance and a second distance; (ii) rotating the object or rotating a capture device of the beam apparatus; (iii) determining a further second distance; and (iv) determining a second position of the predefinable region of the object in relation to the marking using the first distance, the second distance and the further second distance.
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