发明公开
- 专利标题: CHEMICAL LIQUID STORAGE BODY
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申请号: US18627780申请日: 2024-04-05
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公开(公告)号: US20240246853A1公开(公告)日: 2024-07-25
- 发明人: Tetsuya Kamimura , Masahiro Yoshidome , Yukihisa Kawada
- 申请人: FUJIFILM Corporation
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP 17170832 2017.09.06 JP 18155196 2018.08.22
- 分案原申请号: US16787197 2020.02.11
- 主分类号: C03C17/245
- IPC分类号: C03C17/245 ; B65D23/02 ; C03C17/00 ; C09G1/00 ; G03F7/004 ; H01L21/027
摘要:
The chemical liquid storage includes a container and a chemical liquid, wherein the chemical liquid contains at least one of Fe, Al, Cr, and Ni, a content of the specific metal component in the chemical liquid with respect to a total mass of the chemical liquid is equal to or smaller than 100 mass ppt, at least a portion of a liquid contact portion of the container is formed of glass containing sodium atoms, and provided that B represents a content of sodium atoms in a bulk region with respect to a total mass of the bulk region, and A represents a content of sodium atoms in a surface region with respect to a total mass of the surface region, a content mass ratio of A to B represented by A/B is higher than 0.10 and less than 1.0 in at least a portion of the liquid contact portion.
公开/授权文献
- US4816P Kalanchoe plant 公开/授权日:1982-01-26
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