Invention Publication
- Patent Title: INTAKE/EXHAUST DEVICE OF APPARATUS FOR CONTINUOUSLY GROWING SILICON INGOT
-
Application No.: US18030814Application Date: 2021-09-16
-
Publication No.: US20240240353A1Publication Date: 2024-07-18
- Inventor: Young Min LEE , Kyung Seok LEE , Han Woong JEON
- Applicant: HANWHA SOLUTIONS CORPORATION , HANWHA CORPORATION
- Applicant Address: KR Seoul
- Assignee: HANWHA SOLUTIONS CORPORATION,HANWHA CORPORATION
- Current Assignee: HANWHA SOLUTIONS CORPORATION,HANWHA CORPORATION
- Current Assignee Address: KR Seoul; KR Seoul
- Priority: KR 20200129626 2020.10.07
- International Application: PCT/KR2021/012741 2021.09.16
- Date entered country: 2023-09-07
- Main IPC: C30B15/20
- IPC: C30B15/20 ; C30B29/06

Abstract:
An intake/exhaust device of an apparatus for continuously growing a silicon ingot is disclosed. The intake/exhaust device of an apparatus for continuously growing a silicon ingot, according to the present invention, comprises: a chamber of which the inside is maintained in a vacuum atmosphere, and which includes a first section having a main crucible provided in the center thereof so that an ingot grows therein, and a second section having, on the outer side of the upper end thereof, a preliminary melting device for providing molten silicon to the main crucible; and a vacuum pump connected to the chamber to provide vacuum pressure so that the inside thereof is maintained in a vacuum atmosphere, wherein the first section of the chamber has a first injection port in through which inert gas for removing oxides and impurities inside the chamber flows, and a first exhaust port through which the gas is discharged, and the second section of the chamber also has a second injection port in through which the inert gas flows, and a second exhaust port through which the gas is discharged.
Information query
IPC分类: