发明公开
- 专利标题: LASER SYSTEM
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申请号: US18552634申请日: 2022-03-07
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公开(公告)号: US20240170905A1公开(公告)日: 2024-05-23
- 发明人: Herman Philip GODFRIED
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 国际申请: PCT/EP2022/055762 2022.03.07
- 进入国家日期: 2023-09-26
- 主分类号: H01S3/00
- IPC分类号: H01S3/00 ; G02B27/48 ; G03F7/00 ; H01S3/225
摘要:
A laser system comprising: a laser operable to generate a laser beam; an optical system comprising a first optical element and a second optical element; and an output through which the laser beam exits the laser system; the laser, optical system and output arranged such that the laser beam travels to the first optical element, the second optical element and the output sequentially; wherein the first optical element has a first focal length, the second optical element has a second focal length equal to the first focal length, and the second optical element is spaced from the first optical element by a distance of two times the first focal length.
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