- 专利标题: INGOT GROWTH APPARATUS AND METHOD FOR CONTROLLING PRELIMINARY CRUCIBLE OF INGOT GROWTH APPARATUS
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申请号: US18551066申请日: 2022-06-23
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公开(公告)号: US20240167190A1公开(公告)日: 2024-05-23
- 发明人: Keun Ho KIM , Jin Sung PARK , Young Min LEE , Han Woong JEON
- 申请人: HANWHA SOLUTIONS CORPORATION
- 申请人地址: KR Seoul
- 专利权人: HANWHA SOLUTIONS CORPORATION
- 当前专利权人: HANWHA SOLUTIONS CORPORATION
- 当前专利权人地址: KR Seoul
- 优先权: KR 20210083428 2021.06.25
- 国际申请: PCT/KR2022/008919 2022.06.23
- 进入国家日期: 2023-09-18
- 主分类号: C30B15/12
- IPC分类号: C30B15/12 ; C30B15/02 ; C30B15/14 ; C30B15/20 ; C30B29/06
摘要:
An ingot growth apparatus according to an embodiment of the present invention comprises: a growth furnace having a main crucible which is disposed within the growth furnace and holds molten silicon therein in order to grow an ingot; a preliminary melting part having a preliminary crucible which is supplied with a solid silicon material, melts the solid silicon material, and supplies the molten silicon to the main crucible; a temperature detection sensor which is disposed above the preliminary melting part and detects the temperature of the solid silicon material or molten silicon held in the preliminary melting part; and a control part which controls supply of the molten silicon from the preliminary crucible to the main crucible on the basis of the temperature detected by the temperature detection sensor.
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