- 专利标题: OPTICAL INSPECTION APPARATUS, OPTICAL INSPECTION SYSTEM, OPTICAL INSPECTION METHOD, AND NON-TRANSITORY STORAGE MEDIUM
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申请号: US18174708申请日: 2023-02-27
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公开(公告)号: US20240094114A1公开(公告)日: 2024-03-21
- 发明人: Hiroshi OHNO , Hiroya KANO , Hideaki OKANO
- 申请人: KABUSHIKI KAISHA TOSHIBA
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP 22148783 2022.09.20
- 主分类号: G01N21/25
- IPC分类号: G01N21/25 ; G01N21/29
摘要:
According to an embodiment, an optical inspection apparatus includes: an illumination portion, a wavelength selection portion and an imaging portion. The illumination portion irradiates a first object point of a surface of an object with first illumination light, and a second object point of the surface of the object with second illumination light. The imaging portion images light from the first object point through the wavelength selection portion when a normal direction at the first object point and a direction of the first illumination light have an opposing relationship, and images light from the second object point through the wavelength selection portion when a normal direction at the second object point and a direction of the second illumination light have an opposing relationship.
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