The present application provided a monitoring method and a monitoring device based on RF technology, where the monitoring method includes: collecting monitoring information of a target object through a MEMS chip; and outputting a pulse sequence carrying the monitoring information to an oscillator and a power amplifier in a RF circuit through the MEMS chip, where the monitoring information is characterized through the pulse sequence by a time interval between two adjacent pulses; and modulating a phase of a generated carrier by the oscillator according to the pulse sequence, and amplifying a modulated signal by the power amplifier, so that an amplified signal is transmitted through an antenna; where the MEMS chip works in an operation mode when outputting a high level of the pulse sequence, and in an idle mode when outputting a low level of the pulse sequence or ending outputting the pulse sequence.