Invention Publication
- Patent Title: ELECTRONIC DEVICES COMPRISING AN OXIDE FILL REGION, AND RELATED ELECTRONIC SYSTEMS AND METHODS
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Application No.: US17813818Application Date: 2022-07-20
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Publication No.: US20240032294A1Publication Date: 2024-01-25
- Inventor: John D. Hopkins
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L27/11519 ; H01L27/11565
Abstract:
An electronic device comprising a source stack comprising one or more conductive materials, and an oxide fill region within an upper portion of the source stack. A source contact is adjacent to the source stack and the oxide fill region, and a doped semiconductive material is adjacent to the source contact. Tiers of alternating conductive materials and dielectric materials are adjacent to the doped semiconductive material, and pillars extend through the tiers, the doped semiconductive material, and the source contact and into the source stack. Additional electronic devices are also disclosed, as are related methods and electronic systems.
Information query
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