- 专利标题: LAMINAR FLOW RESTRICTOR AND SEAL FOR SAME
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申请号: US18375629申请日: 2023-10-02
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公开(公告)号: US20240026909A1公开(公告)日: 2024-01-25
- 发明人: Sean Joseph Penley , Zachariah Ezekiel McIntyre , Tyler James Wright , Matthew Eric Kovacic , Christopher Bryant Davis
- 申请人: Ichor Systems, Inc.
- 申请人地址: US CA Fremont
- 专利权人: Ichor Systems, Inc.
- 当前专利权人: Ichor Systems, Inc.
- 当前专利权人地址: US CA Fremont
- 主分类号: F15D1/02
- IPC分类号: F15D1/02 ; H01L21/67 ; F16K1/32
摘要:
Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.
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