Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICES
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Application No.: US18320816Application Date: 2023-05-19
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Publication No.: US20240015978A1Publication Date: 2024-01-11
- Inventor: Siyeon Cho , Taeyoung Kim , Hyunmog Park , Bongyong Lee , Yukio Hayakawa
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Priority: KR 20220082342 2022.07.05
- Main IPC: H10B51/20
- IPC: H10B51/20 ; H10B51/10 ; H01L23/528

Abstract:
Disclosed are semiconductor memory devices and electronic systems including the same. The semiconductor memory device may include a vertical channel perpendicular to a top surface of a substrate, word lines disposed on a first side of the vertical channel and vertically stacked on the substrate, back-gate electrodes disposed on a second side of the vertical channel and vertically stacked on the substrate, a ferroelectric layer disposed between the word lines and the first side of the vertical channel, a first intermediate insulating layer disposed between the ferroelectric layer and the first side of the vertical channel, and a second intermediate insulating layer disposed between the back-gate electrodes and the second side of the vertical channel.
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