• 专利标题: LASER DEVICE, EVALUATION METHOD FOR LASER LIGHT SPECTRUM, AND ELECTRONIC DEVICE MANUFACTURING METHOD
  • 申请号: US18467121
    申请日: 2023-09-14
  • 公开(公告)号: US20240003743A1
    公开(公告)日: 2024-01-04
  • 发明人: Takamitsu KOMAKIToshihiro OGA
  • 申请人: Gigaphoton Inc.
  • 申请人地址: JP Tochigi
  • 专利权人: Gigaphoton Inc.
  • 当前专利权人: Gigaphoton Inc.
  • 当前专利权人地址: JP Tochigi
  • 主分类号: G01J3/45
  • IPC分类号: G01J3/45
LASER DEVICE, EVALUATION METHOD FOR LASER LIGHT SPECTRUM, AND ELECTRONIC DEVICE MANUFACTURING METHOD
摘要:
A laser device connectable to an exposure apparatus includes a spectrometer configured to generate a measurement waveform from an interference pattern of laser light output from the laser device; and a processor configured to calculate a first spectral waveform indicating a relationship between a wavelength and a light intensity using the measurement waveform, calculate a representative waveform included in a wavelength range of the first spectral waveform, and calculate an evaluation value of the first spectral waveform using a first integration value obtained by integrating, over the wavelength range, a product of a function of a wavelength deviation from the representative wavelength and the light intensity.
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