- 专利标题: LASER DEVICE, EVALUATION METHOD FOR LASER LIGHT SPECTRUM, AND ELECTRONIC DEVICE MANUFACTURING METHOD
-
申请号: US18467121申请日: 2023-09-14
-
公开(公告)号: US20240003743A1公开(公告)日: 2024-01-04
- 发明人: Takamitsu KOMAKI , Toshihiro OGA
- 申请人: Gigaphoton Inc.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 主分类号: G01J3/45
- IPC分类号: G01J3/45
摘要:
A laser device connectable to an exposure apparatus includes a spectrometer configured to generate a measurement waveform from an interference pattern of laser light output from the laser device; and a processor configured to calculate a first spectral waveform indicating a relationship between a wavelength and a light intensity using the measurement waveform, calculate a representative waveform included in a wavelength range of the first spectral waveform, and calculate an evaluation value of the first spectral waveform using a first integration value obtained by integrating, over the wavelength range, a product of a function of a wavelength deviation from the representative wavelength and the light intensity.
信息查询